ITO Sputtering Target
Senxiang (Ningbo) New Material Co., Ltd. is the manufacturer and supplier of ITO rotary sputtering target in China. For many years, we have been committed to the production, research and development, sales and service of ITO sputtering targets. Our products have good price advantages, covering most European and American markets. We look forward to becoming your long-term partner in China.
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Product Description
Senxiang ITO sputtering target is a ternary composition of Indium, Tin, and Oxygen in varying proportions. Depending on the oxygen content, it can either be described as a ceramic or alloy. Indium tin oxide is typically encountered as an oxygen-saturated composition with a formulation of 74% In, 18% O2, and 8% Sn by weight. It is transparent and colorless in thin layers, while in the bulk form, it is yellowish to grey.
ITO sputtering target is a kind of indium tin oxide raw material by sputtering deposition. According to the different shapes, ITO sputtering targets can be divided into circular, rectangular, square, annular, oval, cylindrical, planar, rotatable (rotary) ITO targets. ITO is among the most heavily utilized compounds in the thin film industry due to its electrical conductivity and optical transparency.
Product Parameter (Specification)
| Composition | 90wt% In2O3 + 10wt% SnO2 |
| Purity | > 99.99% |
| Density （g/cm³） | > 7.13% |
|
Electrical resistivity (Ω.cm) |
< 2x10-4 |
| Theoretical density (g/cm3) | 7.706 |
|
Metal impurity (ppm) |
Si < 10, Fe < 5, Na < 5, Ca < 5, Pb < 2, Cd < 5 Total < 100 |
| Dimension (mm) |
Maximal OD 145~150 Maximal Length 3000 Maximal single segment length 250 Bonding ratio > 95% |
Product Feature And Application
High purity ITO sputtering target can be used in many applications. The details are as follows:
- FPD, Touch panel, Solar cells, LED;
- Semicoductor;
- Special glass, Freezer glass;
- Precision optics.
Product Details
